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MEMS stands for MicroElectroMechanical Systems. Currently, the word MEMS denotes man-made mechanical elements, sensors, actuators and electronics that that were produced using microfabrication technology and are integrated on a silicon substrate. Increasingly, the word MEMS is used for miniaturized devices that are based on Silicon technology or traditional precision engineering, chemical or mechanical.


NEMS stands for NanoElectroMechanical Systems. NEMS extend miniaturization further toward the ultimate limit of individual atoms and molecules. NEMS are man-made devices with functional units on a length scale between 1 and 100 nm. Some NEMS are based on the movement of nanometer-scale components.


Nanoelectronics extends miniaturization further toward the ultimate limit of individual atoms and molecules. On such a small scale, billions of devices could be integrated into a single nanoelectronical system. Nanoelectronics is often considered a disruptive technology because present candidates for nanoelectronical functional elements are significantly different from traditional transistors.

MEMS / NEMS / Nanoelectronics

Plasma System Nano UHP

The plasma system Nano UHP with 18 litres chamber volume ...

Recs® | Server

Recs® | Server products are highly efficient computer ...

Recs® | Storage

All modules are coordinated to achieve the optimum in ...

Silicon Half Grids for Focused Ion Beam (FIB用シリコンハーフグリッド)

FIB試料調整用シリコンハーフグリッドは、あらゆる材料からなるTEM, トモグラフィー, 原子プローブ用in-situ ...

Single-module luminaires BIO 02-25-40

Single-module lighting fixtures AtomSvet® BIO

Skimpy® - The New Server Concept

All that a server needs Skimpy® is the new lean server ...

SM32

3 axes microstep controller System Microsteps down to 1/64 ...

Spiritus ESS

Electrostimulation system and technology for cells ...

Stepper Motor Drive

The stepper driver IPM 306 amplifies the signals of a ...