Micro-Opto-Electro-Mechanical Systems (MOEMS) are not a special class of Micro-Electro-Mechanical Systems (MEMS) but rather the combination of MEMS merged with Micro-optics; this involves sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems. MOEMS includes a wide variety of devices including optical switch, optical cross-connect, tunable VCSEL, microbolometers amongst others. These devices are usually fabricated using micro-optics and standard micromachining technologies using materials like silicon, silicon dioxide, silicon nitride and gallium arsenide.

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