Nanolithography

Nanolithography refers study and application of printing nanoscale patterns on surfaces. There are 5 main fabrication methods, 1- top-down or buttom-up, mak or maskless/direct-write, beam or tip-based, resist-based or resist-less.

Nanolithography can be used as Multigate devices such as Nanowires, FET, Photomasks, NEMS or semiconductor integrated circuits.

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